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Ion beam analysis in material science
Macková, Anna ; Bočan, Jiří ; Malinský, Petr
In this paper we presented our results of complementary research using ion beam analysis for study of materials. Combination of RBS, PIXE and ERDA method enables us to characterize the elemental composition and the elemental depth profiles of complex multi-layer systems or study complicated difussion processes in different applications of material sciences. We described the newly installed methods TOF-ERDA and RBS-channeling and their application on material characterization and the results of testing of these methods at our workplace.

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